Monolithic optical microlithography of high-density elastic circuits

doi:10.1126/science.abh3551

GSTDTAP > 气候变化

DOI	10.1126/science.abh3551
	Monolithic optical microlithography of high-density elastic circuits
	Yu-Qing Zheng; Yuxin Liu; Donglai Zhong; Shayla Nikzad; Shuhan Liu; Zhiao Yu; Deyu Liu; Hung-Chin Wu; Chenxin Zhu; Jinxing Li; Helen Tran; Jeffrey B.-H. Tok; Zhenan Bao
	2021-07-02
发表期刊	Science
出版年	2021
英文摘要	As a platform for electronic devices, polymeric materials offer the advantages of intrinsic flexibility and stretchability relative to hard material devices. However, unlike materials such as silicon, there are few tools for large-scale patterning of monolithic devices. Zheng et al. developed an optical lithography technique for the high-throughput fabrication of transistor circuitry on stretchable substrates. In this method, ultraviolet light is used to control the local solubility of the polymer, which makes it possible to fabricate transistors on the micrometer scale. These devices can be made with high yield and excellent uniformity without compromising their electronic and mechanical characteristics. Science , abh3551, this issue p. [88][1] Polymeric electronic materials have enabled soft and stretchable electronics. However, the lack of a universal micro/nanofabrication method for skin-like and elastic circuits results in low device density and limited parallel signal recording and processing ability relative to silicon-based devices. We present a monolithic optical microlithographic process that directly micropatterns a set of elastic electronic materials by sequential ultraviolet light–triggered solubility modulation. We fabricated transistors with channel lengths of 2 micrometers at a density of 42,000 transistors per square centimeter. We fabricated elastic circuits including an XOR gate and a half adder, both of which are essential components for an arithmetic logic unit. Our process offers a route to realize wafer-level fabrication of complex, high-density, and multilayered elastic circuits with performance rivaling that of their rigid counterparts. [1]: /lookup/doi/10.1126/science.abh3551
领域	气候变化 ; 资源环境
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文献类型	期刊论文
条目标识符	http://119.78.100.173/C666/handle/2XK7JSWQ/334184
专题	气候变化资源环境科学
推荐引用方式 GB/T 7714	Yu-Qing Zheng,Yuxin Liu,Donglai Zhong,et al. Monolithic optical microlithography of high-density elastic circuits[J]. Science,2021.
APA	Yu-Qing Zheng.,Yuxin Liu.,Donglai Zhong.,Shayla Nikzad.,Shuhan Liu.,...&Zhenan Bao.(2021).Monolithic optical microlithography of high-density elastic circuits.Science.
MLA	Yu-Qing Zheng,et al."Monolithic optical microlithography of high-density elastic circuits".Science (2021).