Electron ptychography achieves atomic-resolution limits set by lattice vibrations

doi:10.1126/science.abg2533

GSTDTAP > 气候变化

DOI	10.1126/science.abg2533
	Electron ptychography achieves atomic-resolution limits set by lattice vibrations
	Zhen Chen; Yi Jiang; Yu-Tsun Shao; Megan E. Holtz; Michal Odstrčil; Manuel Guizar-Sicairos; Isabelle Hanke; Steffen Ganschow; Darrell G. Schlom; David A. Muller
	2021-05-21
发表期刊	Science
出版年	2021
英文摘要	Two major problems that limit the resolution and interpretation of electron microscopy images are lens aberrations and multiple scattering. Chen et al. overcame these issues with ptychography, a technique that uses coherent scattering and multiple overlapping illumination spots to reconstruct an image from far-field diffraction patterns. This method works at a resolution that is limited, not by optics, but rather by the scattering strength of the sample, so it can work better with thicker samples. The authors achieved ultimate lateral resolution better than the thermal vibration of atoms in a PrScO3 sample and showed that it is theoretically possible to identify single dopant atoms. Science , abg2533, this issue p. [826][1] Transmission electron microscopes use electrons with wavelengths of a few picometers, potentially capable of imaging individual atoms in solids at a resolution ultimately set by the intrinsic size of an atom. However, owing to lens aberrations and multiple scattering of electrons in the sample, the image resolution is reduced by a factor of 3 to 10. By inversely solving the multiple scattering problem and overcoming the electron-probe aberrations using electron ptychography, we demonstrate an instrumental blurring of less than 20 picometers and a linear phase response in thick samples. The measured widths of atomic columns are limited by thermal fluctuations of the atoms. Our method is also capable of locating embedded atomic dopant atoms in all three dimensions with subnanometer precision from only a single projection measurement. [1]: /lookup/doi/10.1126/science.abg2533
领域	气候变化 ; 资源环境
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文献类型	期刊论文
条目标识符	http://119.78.100.173/C666/handle/2XK7JSWQ/328824
专题	气候变化资源环境科学
推荐引用方式 GB/T 7714	Zhen Chen,Yi Jiang,Yu-Tsun Shao,et al. Electron ptychography achieves atomic-resolution limits set by lattice vibrations[J]. Science,2021.
APA	Zhen Chen.,Yi Jiang.,Yu-Tsun Shao.,Megan E. Holtz.,Michal Odstrčil.,...&David A. Muller.(2021).Electron ptychography achieves atomic-resolution limits set by lattice vibrations.Science.
MLA	Zhen Chen,et al."Electron ptychography achieves atomic-resolution limits set by lattice vibrations".Science (2021).