Seeded 2D epitaxy of large-area single-crystal films of the van der Waals semiconductor 2H MoTe<sub>2</sub>

doi:10.1126/science.abf5825

GSTDTAP > 气候变化

DOI	10.1126/science.abf5825
	Seeded 2D epitaxy of large-area single-crystal films of the van der Waals semiconductor 2H MoTe₂
	Xiaolong Xu; Yu Pan; Shuai Liu; Bo Han; Pingfan Gu; Siheng Li; Wanjin Xu; Yuxuan Peng; Zheng Han; Ji Chen; Peng Gao; Yu Ye
	2021-04-09
发表期刊	Science
出版年	2021
英文摘要	Small, single crystals are often used to direct the growth of larger, bulk single crystals. Xu et al. modified these methods to grow single-crystal films of a two-dimensional (2D) semiconductor, 2H molybdenum ditelluride (2H MoTe2), on an amorphous glass surface. After coating the wafer with a 1T′ MoTe2 film, a small 2H MoTe2 crystallite was placed on the wafer. The wafer was capped with an alumina film, except for a small hole above the seed region that allowed entry of additional tellurium during the heating process that drove the phase transition and epitaxial growth of 2H MoTe2. Science , this issue p. [195][1] The integration of two-dimensional (2D) van der Waals semiconductors into silicon electronics technology will require the production of large-scale, uniform, and highly crystalline films. We report a route for synthesizing wafer-scale single-crystalline 2H molybdenum ditelluride (MoTe2) semiconductors on an amorphous insulating substrate. In-plane 2D-epitaxy growth by tellurizing was triggered from a deliberately implanted single seed crystal. The resulting single-crystalline film completely covered a 2.5-centimeter wafer with excellent uniformity. The 2H MoTe2 2D single-crystalline film can use itself as a template for further rapid epitaxy in a vertical manner. Transistor arrays fabricated with the as-prepared 2H MoTe2 single crystals exhibited high electrical performance, with excellent uniformity and 100% device yield. [1]: /lookup/doi/10.1126/science.abf5825
领域	气候变化 ; 资源环境
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文献类型	期刊论文
条目标识符	http://119.78.100.173/C666/handle/2XK7JSWQ/322100
专题	气候变化资源环境科学
推荐引用方式 GB/T 7714	Xiaolong Xu,Yu Pan,Shuai Liu,et al. Seeded 2D epitaxy of large-area single-crystal films of the van der Waals semiconductor 2H MoTe₂[J]. Science,2021.
APA	Xiaolong Xu.,Yu Pan.,Shuai Liu.,Bo Han.,Pingfan Gu.,...&Yu Ye.(2021).Seeded 2D epitaxy of large-area single-crystal films of the van der Waals semiconductor 2H MoTe₂.Science.
MLA	Xiaolong Xu,et al."Seeded 2D epitaxy of large-area single-crystal films of the van der Waals semiconductor 2H MoTe₂".Science (2021).