Global S&T Development Trend Analysis Platform of Resources and Environment
DOI | 10.1126/science.aax8760 |
Scalable submicrometer additive manufacturing | |
Saha, Sourabh K.1,3; Wang, Dien2; Nguyen, Vu H.1; Chang, Yina2; Oakdale, James S.1; Chen, Shih-Chi2 | |
2019-10-04 | |
发表期刊 | SCIENCE
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ISSN | 0036-8075 |
EISSN | 1095-9203 |
出版年 | 2019 |
卷号 | 366期号:6461页码:105-+ |
文章类型 | Article |
语种 | 英语 |
国家 | USA; Peoples R China |
英文摘要 | High-throughput fabrication techniques for generating arbitrarily complex three-dimensional structures with nanoscale features are desirable across a broad range of applications. Two-photon lithography (TPL)-based submicrometer additive manufacturing is a promising candidate to fill this gap. However, the serial point-by-point writing scheme of TPL is too slow for many applications. Attempts at parallelization either do not have submicrometer resolution or cannot pattern complex structures. We overcome these difficulties by spatially and temporally focusing an ultrafast laser to implement a projection-based layer-by-layer parallelization. This increases the throughput up to three orders of magnitude and expands the geometric design space. We demonstrate this by printing, within single-digit millisecond time scales, nanowires with widths smaller than 175 nanometers over an area one million times larger than the cross-sectional area. |
领域 | 地球科学 ; 气候变化 ; 资源环境 |
收录类别 | SCI-E |
WOS记录号 | WOS:000489147000065 |
WOS关键词 | 2-PHOTON POLYMERIZATION ; LASER ; MICROFABRICATION ; LITHOGRAPHY ; MICROSCOPY |
WOS类目 | Multidisciplinary Sciences |
WOS研究方向 | Science & Technology - Other Topics |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://119.78.100.173/C666/handle/2XK7JSWQ/202454 |
专题 | 地球科学 资源环境科学 气候变化 |
作者单位 | 1.Lawrence Livermore Natl Lab, Ctr Engn Mat & Mfg, Livermore, CA 94550 USA; 2.Chinese Univ Hong Kong, Dept Mech & Automat Engn, Shatin, Hong Kong, Peoples R China; 3.Georgia Inst Technol, Woodruff Sch Mech Engn, Atlanta, GA 30332 USA |
推荐引用方式 GB/T 7714 | Saha, Sourabh K.,Wang, Dien,Nguyen, Vu H.,et al. Scalable submicrometer additive manufacturing[J]. SCIENCE,2019,366(6461):105-+. |
APA | Saha, Sourabh K.,Wang, Dien,Nguyen, Vu H.,Chang, Yina,Oakdale, James S.,&Chen, Shih-Chi.(2019).Scalable submicrometer additive manufacturing.SCIENCE,366(6461),105-+. |
MLA | Saha, Sourabh K.,et al."Scalable submicrometer additive manufacturing".SCIENCE 366.6461(2019):105-+. |
条目包含的文件 | 条目无相关文件。 |
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